Chang Liu

Professor, Department of Mechanical and Electrical Engineering, and Computer Science
PhD (1995) California Institute of Technology
changliu@northwestern.edu

Areas of Interest:

Microfabrication technology
Nanofabrication
Bioinspired sensors
Smart integrated systems  

Chang Liu is developing artificial haircell sensors that mimic the haircell sensor. The biological haircell is a common neuronal mechanoreceptor and is responsible for a wide variety of sensing in different animal species. Using microfabrication technology, he investigates methods of increasing their functionality, increasing performance, and reducing packaging complexity.  He is also developing massively parallel scanning probe based nanolithography technology and microfluid lab-on-chip systems for nanofabrication and biochemical detection. Professor Liu's multidisciplinary research program centers on MEMS and devices and covers wide length scales.